Nanomanufacturing is the production of useful nano-scale materials, structures, devices and systems in an economically viable manner. The NSF Nanomanufacturing Program supports fundamental research in novel methods and techniques for batch and continuous processes, top-down (addition/subtraction) and bottom-up (directed self-assembly) processes leading to the formation of complex heterogeneous nanosystems. The program supports basic research in nanostructure and process design principles, integration across length-scales, and system-level integration. The Program leverages advances in the understanding of nano-scale phenomena and processes (physical, chemical, electrical, thermal, mechanical and biological), nanomaterials discovery, novel nanostructure architectures, and new nanodevice and nanosystem concepts. It seeks to address quality, efficiency, scalability, reliability, safety and affordability issues that are relevant to manufacturing.